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tono/docs/nodes/SMM Analysis.md

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SMM Analysis

Scanning Microwave Microscopy analysis: perform 3-point calibration and de-embedding to convert raw S11 reflection coefficient measurements into quantitative tip-sample capacitance and impedance maps. Equivalent to Gwyddion's smm.c and smm_apply.c modules.

Inputs

Name Type Required Description
s11_amplitude DATA_FIELD Yes Measured S11 reflection coefficient amplitude
s11_phase DATA_FIELD Yes Measured S11 reflection coefficient phase (radians)

Outputs

Name Type Description
capacitance DATA_FIELD Calibrated tip-sample capacitance map (unit: F)
impedance_real DATA_FIELD Real part of the de-embedded tip-sample impedance (unit: Ohm)

Controls

Name Type Default Description
frequency FLOAT 1e9 Microwave excitation frequency in Hz
ref_impedance FLOAT 50.0 Reference impedance of the transmission line in Ohm
cal_c1 FLOAT First calibration capacitance standard (F)
cal_c2 FLOAT Second calibration capacitance standard (F)
cal_c3 FLOAT Third calibration capacitance standard (F)
cal_s11_1 FLOAT Measured S11 (complex magnitude) at the first calibration standard
cal_s11_2 FLOAT Measured S11 (complex magnitude) at the second calibration standard
cal_s11_3 FLOAT Measured S11 (complex magnitude) at the third calibration standard

Notes

  • SMM measures local microwave impedance and capacitance by recording the S11 reflection coefficient of a scanning probe coupled to a vector network analyser (VNA) operating at GHz frequencies.
  • The 3-point calibration procedure uses three known capacitance standards to solve for the VNA error terms and correct systematic measurement errors, mapping raw S11 values to the true tip-sample impedance.
  • The error model decomposes VNA systematics into three terms: e00 (directivity), e01 (tracking), and e11 (source match). These are determined from the three calibration measurements and then used to de-embed every pixel.
  • Calibration capacitances should span the expected measurement range; widely spaced standards yield a better-conditioned error model and more accurate results.
  • The phase input must be in radians. If your data is in degrees, convert before connecting to this node.