# SMM Analysis Scanning Microwave Microscopy analysis: perform 3-point calibration and de-embedding to convert raw S11 reflection coefficient measurements into quantitative tip-sample capacitance and impedance maps. Equivalent to Gwyddion's smm.c and smm_apply.c modules. ## Inputs | Name | Type | Required | Description | |------|------|----------|-------------| | s11_amplitude | DATA_FIELD | Yes | Measured S11 reflection coefficient amplitude | | s11_phase | DATA_FIELD | Yes | Measured S11 reflection coefficient phase (radians) | ## Outputs | Name | Type | Description | |------|------|-------------| | capacitance | DATA_FIELD | Calibrated tip-sample capacitance map (unit: F) | | impedance_real | DATA_FIELD | Real part of the de-embedded tip-sample impedance (unit: Ohm) | ## Controls | Name | Type | Default | Description | |------|------|---------|-------------| | frequency | FLOAT | 1e9 | Microwave excitation frequency in Hz | | ref_impedance | FLOAT | 50.0 | Reference impedance of the transmission line in Ohm | | cal_c1 | FLOAT | — | First calibration capacitance standard (F) | | cal_c2 | FLOAT | — | Second calibration capacitance standard (F) | | cal_c3 | FLOAT | — | Third calibration capacitance standard (F) | | cal_s11_1 | FLOAT | — | Measured S11 (complex magnitude) at the first calibration standard | | cal_s11_2 | FLOAT | — | Measured S11 (complex magnitude) at the second calibration standard | | cal_s11_3 | FLOAT | — | Measured S11 (complex magnitude) at the third calibration standard | ## Notes - SMM measures local microwave impedance and capacitance by recording the S11 reflection coefficient of a scanning probe coupled to a vector network analyser (VNA) operating at GHz frequencies. - The 3-point calibration procedure uses three known capacitance standards to solve for the VNA error terms and correct systematic measurement errors, mapping raw S11 values to the true tip-sample impedance. - The error model decomposes VNA systematics into three terms: e00 (directivity), e01 (tracking), and e11 (source match). These are determined from the three calibration measurements and then used to de-embed every pixel. - Calibration capacitances should span the expected measurement range; widely spaced standards yield a better-conditioned error model and more accurate results. - The phase input must be in radians. If your data is in degrees, convert before connecting to this node.